It is made of low-pollution materials.
Trays can be stacked on top of each other or with covers.
It comes with a packing, so it is airtight. Size (mm): 339 x 339 x 43
Suitable wafer diameter (mm): φ300 (12″)
Material: Cover/case: PC (polycarbonate), cushion/gasket: elastomer
Set contents: Main unit, cover, spring x 1 each
RoHS2 (EU)2015/863 compliant [About RoHS]
