Mass flow controller 5SLM-N2 C1005 1 piece

Thermal flow sensors are less susceptible to external temperature effects. Suppresses flow surges at start-up. Full scale flow rate: 5SLM-N2 Gas type: N2 Flow rate accuracy: ±2% FS (accuracy guaranteed range: 15 to 35°C) Response time: 6 seconds Flow control range: 5 to 100% FS Input/Output: Analog signal (0 to 5VDC) Valve type: N/O normally open Repeatability: ±0.2%FS Operating pressure range: 50-300kPa Pressure resistance: 1MPa (G) External leak rate: 1×10^-7Pa･m3/sec (He) or less Gas contact parts material: SUS316, PTFE, fluororubber Connection: 1/4in.SWL equivalent Power supply: +15VDC±5% 60mA, -15VDC±5% 150mA Communication method: Analog 0 to 5VDC (D-Sub9Pin connector) Size: 127 x 25.5 x 100mm