It is possible to efficiently clean a large number of small diameter wafers at once.
Suitable for cleaning and drying small diameter wafers.
It is a disk shape that can be easily washed in a container such as a beaker. Material: PFA (fluororesin)
Applicable wafer diameter (φmm): 20 to 27
Storage capacity: 24 sheets
Groove pitch: 15°
Size (mm): φ86×21
RoHS2 (EU)2015/863 compliant [About RoHS]
