ULVAC Single-phase 100V Diaphragm type dry vacuum pump Width 203mm DAU-20 1 unit

Catalog number: DAU-20 Features: * Further pursues ultimate pressure performance of diaphragm type vacuum pumps. * Multiple pump heads are arranged in three stages to achieve ultimate pressure that cannot be obtained with normal diaphragm types. Applications: * Wide-range turbo molecular pumps, cryopump exhaust systems, back pumps for mechanical booster pumps. * Load lock chamber exhaust. * Adsorption transport, handling. * For laser gas circulation and exhaust. ●Vacuum drying equipment, linked vacuum drying equipment Specifications: ●Exhaust speed (L/min) 50/60Hz: 20/23 ●Ultimate pressure (Pa): 200 ●Intake port diameter (mm): 10 ●Power supply (V): Single phase 100 ●Overall width (mm): 161 ●Overall length (mm): 327 ●Overall height (mm): 217 ●Power cord length (m): 1.8 ●3-stage exhaust method ●Corrosion resistance of gas-contacting parts ●Can be customized to different voltages from a single unit ●Ultimate pressure (KPa): 0.2 ●Intake and exhaust pipe diameter (mm): OD φ10 × ID φ6 (Rc1/8) ●Maximum dimensions (mm): 161 (W) × 327 (L) × 218 (H) Caution: ●If moisture, debris, corrosive gases, etc. are mixed in the intake gas, they must be removed.