ULVAC Ionization Vacuum Gauge (Multi-Ion Gauge) SH200-A + ISG1 Set (NW25) SH200A-ISG1-NW25-SET 1 S

Catalog number: SH200A-ISG1-NW25-SET Features: ●By adopting a multi-ion gauge, you can select the gauge head according to the application. ●Significantly smaller than conventional products (controller volume reduced by 56%), it is the world's smallest class. ●Set point setting and status confirmation can be done by connecting to a PC or smartphone. ●Long life has been achieved even in harsh environments for vacuum gauges. ●By monitoring the filament power, you can notify the filament life in advance. ●Measurements can be made from atmospheric pressure to high vacuum range (1 x 10^+5 to 1 x 10^-8 Pa) (when optional unit SWU10-R is connected). Applications: ●For process control in the high vacuum range of various manufacturing equipment including semiconductors and electronic components. ●For checking the reached pressure in the high vacuum range of various manufacturing equipment with many process chambers such as online type and single wafer type. ●For pressure measurement of high vacuum and ultra-high vacuum equipment. Specifications: ● Measurement pressure range (Pa): 1 x 10 [to the power of 5] to 1 x 10 [to the power of -8] ● Probe: M-45 (NW-25) / SWP-25 ● Mating flange: NW25 ● Power supply voltage (V): 100 to 240 ● Display: Digital, 2 digit mantissa / 1 digit exponent (LED display) ● Recorder: 0 to 10V / Log output ● External dimensions: 48 x 70 x 96mm (display ISG1) / 69 x 63 x 90mm (ionization vacuum gauge ST200 *controller part) / φ40 x 51 (Pirani vacuum gauge SWU10-R *controller part) Material / finish: ● Probe filament - platinum (Pt) Set contents/accessories: ●SH200-A ●SWU10-R ●M45 sensor head for SH200 ●SWP-25 sensor head for SWU10-R only ●0.5m unit cable for connecting to SWU Note: ●If this product is to be exported outside of Japan, please notify us in advance and you will need to go through the procedures for export control in accordance with the Foreign Exchange and Foreign Trade Control Law and other export control regulations.